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- noun organic chemistry
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The trichlorosilane and unreacted tetrachlorosilane are then separated through distillation, and the unreacted tetrachlorosilane is recycled back into the fluidized bed.
Some of the by-product Tetrachlorosilane from the reactor is distilled to get electronic grade Tetrachlorosilane and some left a it is to get technical grade tetrachlorosilane.
Tetrachlorosilane and metallurgical are placed in a silicon fluidized bed and hydrogenated to produce trichlorosilane and unreacted tetrachlorosilane through the reaction: 3SiCl 4 + 2H 2 + Si = 4SiHCl 3.
Unreacted tetrachlorosilane and trichlorosilane (and dichlorosilane) are distilled
Next, silane is purified through distillation where any remaining tetrachlorosilane is recycled back into the fluidized bed.
Separation of Trichlorosilane from tetrachlorosilane and other impurities using distillation.
= SiH 4 + 2HSiCl 3 2HSiCl 3 = H 2 SiCl 2 + SiCl 4 The silane is then distilled and the unreacted dichlorosilane is recycled back into the second redistribution step and the tetrachlorosilane is recycled back into the fluidized bed.
The first column reaction is: 2HSiCl 3 = H 2 SiCl 2 + SiCl 4 Dichlorosilane is then distilled from the unreacted trichlorosilane and tetrachlorosilane and is recycled back into the fluidized bed and the unreacted trichlorosilane is recycled back into the beginning of the first redistribution step.